JPH0267635U - - Google Patents
Info
- Publication number
- JPH0267635U JPH0267635U JP14662888U JP14662888U JPH0267635U JP H0267635 U JPH0267635 U JP H0267635U JP 14662888 U JP14662888 U JP 14662888U JP 14662888 U JP14662888 U JP 14662888U JP H0267635 U JPH0267635 U JP H0267635U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- processing
- plasma
- plasma generation
- ashing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims 7
- 150000002222 fluorine compounds Chemical class 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000010453 quartz Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- 235000002918 Fraxinus excelsior Nutrition 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 239000002956 ash Substances 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- 229910001882 dioxygen Inorganic materials 0.000 claims 1
- 125000001153 fluoro group Chemical group F* 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14662888U JPH0267635U (en]) | 1988-11-11 | 1988-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14662888U JPH0267635U (en]) | 1988-11-11 | 1988-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0267635U true JPH0267635U (en]) | 1990-05-22 |
Family
ID=31416295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14662888U Pending JPH0267635U (en]) | 1988-11-11 | 1988-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0267635U (en]) |
-
1988
- 1988-11-11 JP JP14662888U patent/JPH0267635U/ja active Pending
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